Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4842683 | Magnetic field-enhanced plasma etch reactor | David Cheng, Dan Maydan, Kenneth R. Stalder, Dana L. Andrews, Mei Chang +4 more | 1989-06-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4842683 | Magnetic field-enhanced plasma etch reactor | David Cheng, Dan Maydan, Kenneth R. Stalder, Dana L. Andrews, Mei Chang +4 more | 1989-06-27 |