Issued Patents 1982
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4341616 | Dry etching device | Haruhiko Abe, Kazuo Mizuguchi | 1982-07-27 |
| 4333226 | Method of forming patterned refractory metal films by selective oxygen implant and sublimation | Haruhiko Abe, Natsuro Tsubouchi, Hiroshi Harada, Junichi Mitsuhashi | 1982-06-08 |