Issued Patents 1982
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4341616 | Dry etching device | Masao Nagatomo, Kazuo Mizuguchi | 1982-07-27 |
| 4333226 | Method of forming patterned refractory metal films by selective oxygen implant and sublimation | Masao Nagatomo, Natsuro Tsubouchi, Hiroshi Harada, Junichi Mitsuhashi | 1982-06-08 |
| 4314874 | Method for forming a fine pattern of an aluminum film | Yoji Mashiko, Hiroshi Harada, Sotoju Asai, Kazuo Mizuguchi, Sumio Nomoto | 1982-02-09 |