Issued Patents 1982
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4341616 | Dry etching device | Masao Nagatomo, Haruhiko Abe | 1982-07-27 |
| 4314874 | Method for forming a fine pattern of an aluminum film | Haruhiko Abe, Yoji Mashiko, Hiroshi Harada, Sotoju Asai, Sumio Nomoto | 1982-02-09 |