Issued Patents 1982
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4333793 | High-selectivity plasma-assisted etching of resist-masked layer | Nadia Lifshitz, Joseph M. Moran | 1982-06-08 |
| 4310380 | Plasma etching of silicon | Daniel Flamm, Dan Maydan | 1982-01-12 |