Issued Patents 1982
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4314875 | Device fabrication by plasma etching | — | 1982-02-09 |
| 4310380 | Plasma etching of silicon | Dan Maydan, David N. Wang | 1982-01-12 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4314875 | Device fabrication by plasma etching | — | 1982-02-09 |
| 4310380 | Plasma etching of silicon | Dan Maydan, David N. Wang | 1982-01-12 |