Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4333793 | High-selectivity plasma-assisted etching of resist-masked layer | Nadia Lifshitz, David N. Wang | 1982-06-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4333793 | High-selectivity plasma-assisted etching of resist-masked layer | Nadia Lifshitz, David N. Wang | 1982-06-08 |