Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322607 | Wafer processing apparatus and wafer processing method | Seung Dae Baek, Kang-Won Lee, Woon Kong | 2025-06-03 |
| 12154819 | Wafer cleaning apparatus and method of controlling the same | Seung Dae Baek, Sung Yup Kim, Jae Hwan SON, Nam-Jin Kim, Jun Goo PARK | 2024-11-26 |