Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261076 | Wafer processing apparatus and wafer processing method | Seung Dae Baek, Sung Yup Kim | 2025-03-25 |
| 12154819 | Wafer cleaning apparatus and method of controlling the same | Seung Dae Baek, Kuem Dong HEO, Sung Yup Kim, Jae Hwan SON, Nam-Jin Kim | 2024-11-26 |