Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480531 | Automatic assessment method and assessment system thereof for yield improvement | Ge Zhao, Fei Wang, Ling Fu, Tao Huang, Xing Jin +2 more | 2022-10-25 |
| 11112482 | Method for calibrating verticality of particle beam and system applied to semiconductor fabrication process | Guangdian Chen, Jin Xing Chen | 2021-09-07 |