Issued Patents All Time
Showing 76–96 of 96 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7116880 | Decreased crosstalk in adjacent photonic waveguides | Xueyuan Liu, Yao Rong Wang, Kristine A. German | 2006-10-03 |
| 7108354 | Electrostatic actuator with segmented electrode | Joel A. Kubby | 2006-09-19 |
| 7070699 | Bistable microelectromechanical system based structures, systems and methods | Joel A. Kubby, Fuqian Yang, Jun Ma, Kristine A. German | 2006-07-04 |
| 7060522 | Membrane structures for micro-devices, micro-devices including same and methods for making same | Elliott A. Eklund, Joel A. Kubby | 2006-06-13 |
| 6987920 | Waveguide structures and methods | Kristine A. German, Joel A. Kubby, Pinyen Lin, Xueyuan Liu, Yao Rong Wang | 2006-01-17 |
| 6985651 | Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same | Jun Ma, Joel A. Kubby, Kristine A. German, Pinyen Lin | 2006-01-10 |
| 6985650 | Thermal actuator and an optical waveguide switch including the same | Jun Ma, Joel A. Kubby, Kristine A. German, Pinyen Lin | 2006-01-10 |
| 6983088 | Thermal actuator and an optical waveguide switch including the same | Joel A. Kubby, Jun Ma, Kristine A. German, Pinyen Lin | 2006-01-03 |
| 6968100 | MEMS waveguide shuttle optical latching switch | Joel A. Kubby, Kathleen A. Feinberg, Kristine A. German, Jun Ma, Pinyen Lin | 2005-11-22 |
| 6947624 | MEMS optical latching switch | Joel A. Kubby, Kathleen A. Feinberg, Kristine A. German, Jun Ma, Pinyen Lin | 2005-09-20 |
| 6828887 | Bistable microelectromechanical system based structures, systems and methods | Joel A. Kubby, Fuqian Yang, Jun Ma, Kristine A. German | 2004-12-07 |
| 6661070 | Micromechanical and microoptomechanical structures with single crystal silicon exposure step | Andrew J. Zosel, Joel A. Kubby, Chuang-Chia Lin, Jingkuang Chen, Alex T. Tran | 2003-12-09 |
| 6572218 | Electrostatically-actuated device having a corrugated multi-layer membrane structure | Elliott A. Eklund | 2003-06-03 |
| 6508947 | Method for fabricating a micro-electro-mechanical fluid ejector | Elliott A. Eklund | 2003-01-21 |
| 6510275 | Micro-optoelectromechanical system based device with aligned structures and method for fabricating same | Alex T. Tran, Joel A. Kubby, Jingkuang Chen, Kathleen A. Feinberg, Yi-Nien Su | 2003-01-21 |
| 6506620 | Process for manufacturing micromechanical and microoptomechanical structures with backside metalization | Bruce R. Scharf, Joel A. Kubby, Chuang-Chia Lin, Alex T. Tran, Andrew J. Zosel +1 more | 2003-01-14 |
| 6479315 | Process for manufacturing micromechanical and microoptomechanical structures with single crystal silicon exposure step | Andrew J. Zosel, Jingkuang Chen, Joel A. Kubby, Chuang-Chia Lin, Alex T. Tran | 2002-11-12 |
| 6479311 | Process for manufacturing micromechanical and microoptomechanical structures with pre-applied patterning | Bruce R. Scharf, Joel A. Kubby, Jingkuang Chen, Chuang-Chia Lin, Alex T. Tran | 2002-11-12 |
| 6467879 | Method and apparatus for preventing degradation of electrostatically actuated devices | Joel A. Kubby, Elliott A. Eklund | 2002-10-22 |
| 6465856 | Micro-fabricated shielded conductors | Jingkuang Chen | 2002-10-15 |
| 6413793 | Method of forming protrusions on single crystal silicon structures built on silicon-on-insulator wafers | Chuang-Chia Lin, Alex T. Tran, Nena Liakopoulos | 2002-07-02 |