| 7212693 |
Optical substance analyzer |
Dustin Wade Carr, Ho Bun Chan |
2007-05-01 |
| 7158693 |
Molecular detection using an optical waveguide fixed to a cantilever |
Dustin Wade Carr |
2007-01-02 |
| 7116855 |
Optical shuttle system and method used in an optical switch |
Fuqian Yang, Joel A. Kubby, Jun Ma |
2006-10-03 |
| 7106441 |
Structure and method for a microelectromechanic cylindrical reflective diffraction grating spectrophotometer |
Decai Sun, Joel A. Kubby, Jingkuang Chen, Patrick Y. Maeda |
2006-09-12 |
| 7002719 |
Mirror for an integrated device |
— |
2006-02-21 |
| 6987898 |
Molecular detection using an optical waveguide fixed to a cantilever |
Dustin Wade Carr |
2006-01-17 |
| 6911913 |
Piezo-resistive sensing of mirror position in an optical switch |
Jungsang Kim, Anatoli Olkhovets |
2005-06-28 |
| 6846087 |
Micromirror having counterbalancing structures and method for manufacturing same |
Dustin Wade Carr, Christopher Frye, Timofei Nikita Kroupenkine, Victor A. Lifton, Michael P. Schlax +1 more |
2005-01-25 |
| 6661070 |
Micromechanical and microoptomechanical structures with single crystal silicon exposure step |
Andrew J. Zosel, Joel A. Kubby, Peter M. Gulvin, Chuang-Chia Lin, Jingkuang Chen |
2003-12-09 |
| 6567448 |
Scanning III-V compound light emitters integrated with Si-based actuators |
Decai Sun, Ross D. Bringans, Christopher L. Chua, Philip D. Floyd, Eric Peeters +1 more |
2003-05-20 |
| 6510275 |
Micro-optoelectromechanical system based device with aligned structures and method for fabricating same |
Joel A. Kubby, Jingkuang Chen, Peter M. Gulvin, Kathleen A. Feinberg, Yi-Nien Su |
2003-01-21 |
| 6506620 |
Process for manufacturing micromechanical and microoptomechanical structures with backside metalization |
Bruce R. Scharf, Joel A. Kubby, Chuang-Chia Lin, Andrew J. Zosel, Peter M. Gulvin +1 more |
2003-01-14 |
| 6479315 |
Process for manufacturing micromechanical and microoptomechanical structures with single crystal silicon exposure step |
Andrew J. Zosel, Peter M. Gulvin, Jingkuang Chen, Joel A. Kubby, Chuang-Chia Lin |
2002-11-12 |
| 6479311 |
Process for manufacturing micromechanical and microoptomechanical structures with pre-applied patterning |
Bruce R. Scharf, Joel A. Kubby, Jingkuang Chen, Peter M. Gulvin, Chuang-Chia Lin |
2002-11-12 |
| 6413793 |
Method of forming protrusions on single crystal silicon structures built on silicon-on-insulator wafers |
Chuang-Chia Lin, Peter M. Gulvin, Nena Liakopoulos |
2002-07-02 |
| 6379989 |
Process for manufacture of microoptomechanical structures |
Joel A. Kubby, Jingkuang Chen |
2002-04-30 |
| 6362512 |
Microelectromechanical structures defined from silicon on insulator wafers |
Joel A. Kubby, Jingkuang Chen |
2002-03-26 |
| 6295130 |
Structure and method for a microelectromechanically tunable fabry-perot cavity spectrophotometer |
Decai Sun, Joel A. Kubby, Eric Peeters |
2001-09-25 |
| 6257739 |
Scanning vertical cavity surface emitting laser array capable of page-width image scan |
Decai Sun |
2001-07-10 |
| 6054335 |
Fabrication of scanning III-V compound light emitters integrated with Si-based actuators |
Decai Sun, Ross D. Bringans, Christopher L. Chua, Philip D. Floyd, Eric Peeters +1 more |
2000-04-25 |
