Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8742536 | SOI disks comprising MEMS structures and filled isolating trenches having a defined cross-section | Gisbert Hoelzer | 2014-06-03 |
| 7989310 | Filling of insulation trenches using CMOS standard processes for creating dielectrically insulated areas on a SOI disk | — | 2011-08-02 |