Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8742536 | SOI disks comprising MEMS structures and filled isolating trenches having a defined cross-section | Karlheinz Freywald | 2014-06-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8742536 | SOI disks comprising MEMS structures and filled isolating trenches having a defined cross-section | Karlheinz Freywald | 2014-06-03 |