Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11875998 | Substrate processing method | Jin-Sung Chun, Sang Jun Park, Byung Chul Cho, Jun Hyuck Kwon | 2024-01-16 |
| 11784029 | Method and apparatus for atomic layer etching | Sang Jun Park, Byung Chul Cho, Jun Hyuck Kwon, Jong Ki An, Tian Hao Han | 2023-10-10 |
| 11450531 | Atomic layer etching method | Jun Hyuck Kwon, Jin-Sung Chun, Sang Jun Park, Byung Chul Cho | 2022-09-20 |
| 10985015 | Method for preparing composite membrane | In Hwan Yi, Byung Chul Cho, Jin-Sung Chun | 2021-04-20 |
| 10381217 | Method of depositing a thin film | Byung Chul Cho, Sang Jin Lee, In Hwan Yi | 2019-08-13 |