Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11875998 | Substrate processing method | Kwang Seon JIN, Jin-Sung Chun, Sang Jun Park, Byung Chul Cho | 2024-01-16 |
| 11784029 | Method and apparatus for atomic layer etching | Kwang Seon JIN, Sang Jun Park, Byung Chul Cho, Jong Ki An, Tian Hao Han | 2023-10-10 |
| 11450531 | Atomic layer etching method | Jin-Sung Chun, Sang Jun Park, Byung Chul Cho, Kwang Seon JIN | 2022-09-20 |
| 10490409 | Precursor for vapor deposition having excellent thermal stability and preparing method thereof | Jung-Woo Park, Hong Ki Kim, Mi Ra Park | 2019-11-26 |