Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11292023 | Substrate processing apparatus | Woo-Young Park, Ja-Hyun Koo, Chang Hee Han, Sung-Eun Lee, Sung-Ho Jeon +2 more | 2022-04-05 |
| 10662528 | Substrate processing apparatus and substrate processing method using the same | Jeong-Min Lee, Jin-Pil Heo, Tae Ho Jeon, Seung Han Lee | 2020-05-26 |