Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11886122 | Deep etching substrates using a bi-layer etch mask | Yixiong Zheng, Matthias Muehle | 2024-01-30 |
| 10749062 | Hybrid tandem solar cells with improved tunnel junction structures | Zhenqiang Ma, Kanglin Xiong, Hongyi Mi, Tzu-Hsuan Chang, Shaoqin Gong | 2020-08-18 |
| 10669631 | Gas injection apparatus and thin film deposition equipment including the same | Ki-Chul Kim, Jung-Il Ahn, Jong-Cheol Lee, Kyu-Hee Han, Seung Han Lee +1 more | 2020-06-02 |
| 10615574 | Superlattice heterostructures formed with single crystalline semiconductor nanomembranes and amorphous tunneling barrier layers | Zhenqiang Ma, Munho Kim, Sang June Cho | 2020-04-07 |
| 10041172 | Gas injection apparatus and thin film deposition equipment including the same | Ki-Chul Kim, Jung-Il Ahn, Jong-Cheol Lee, Kyu-Hee Han, Seung Han Lee +1 more | 2018-08-07 |
| 9899556 | Hybrid tandem solar cells with improved tunnel junction structures | Zhenqiang Ma, Kanglin Xiong, Hongyi Mi, Tzu-Hsuan Chang, Shaoqin Gong | 2018-02-20 |
| 9850594 | Thermal diffusion doping of diamond | Zhenqiang Ma | 2017-12-26 |
| 9704999 | Thin film transistors with trench-defined nanoscale channel lengths | Zhenqiang Ma | 2017-07-11 |
| 9653640 | Metal-oxide-semiconductor field-effect phototransistors based on single crystalline semiconductor thin films | Zhenqiang Ma | 2017-05-16 |
| 9605359 | Thermal diffusion doping of diamond | Zhenqiang Ma | 2017-03-28 |
| 9425351 | Hybrid heterostructure light emitting devices | Zhenqiang Ma | 2016-08-23 |
| 9337622 | Compact distributed bragg reflectors | Zhenqiang Ma | 2016-05-10 |
| 9058993 | Methods for making large-area, free-standing metal oxide films | Xudong Wang, Zhenqiang Ma, Fei Wang | 2015-06-16 |
| 9006785 | Doped and strained flexible thin-film transistors | Zhenqiang Ma, Max G. Lagally | 2015-04-14 |
| 8866154 | Lattice mismatched heterojunction structures and devices made therefrom | Zhenqiang Ma | 2014-10-21 |
| 8502218 | Large-area, free-standing metal oxide films and transistors made therefrom | Xudong Wang, Zhenqiang Ma, Fei Wang | 2013-08-06 |
| 8366827 | Chamber inserts and apparatuses for processing a substrate | Jin-Gi Hong, Kyung-Bum Koo, Yun-Ho Choi, Eun-Taeck Lee, Hyun-Chul Kwun | 2013-02-05 |
| 7902090 | Method of forming a layer on a semiconductor substrate | Young-Wook Park, Jin-Gi Hong | 2011-03-08 |
| 7820244 | Method of forming a layer and method of removing reaction by-products | Jin-Gi Hong, Yun-Ho Choi, Hyun-Chul Kwun, Eun-Taeck Lee, Jin Ho Kim | 2010-10-26 |
| 7547632 | Methods of forming metal layers in the fabrication of semiconductor devices | Gil-Heyun Choi, Jong-Myeong Lee, Hee-Sook Park | 2009-06-16 |
| 7439192 | Method of forming a layer on a semiconductor substrate | Young-Wook Park, Jin-Gi Hong | 2008-10-21 |
| 7384866 | Methods of forming metal interconnections of semiconductor devices by treating a barrier metal layer | Ju-Young Yun, Gil-Heyun Choi, Byung-Hee Kim, Jong-Myeong Lee, Seung-Gil Yang | 2008-06-10 |
| 7279416 | Methods of forming a conductive structure in an integrated circuit device | Gil-Heyun Choi, Jong-Myeong Lee, Hee-Sook Park | 2007-10-09 |
| 6955983 | Methods of forming metal interconnections of semiconductor devices by treating a barrier metal layer | Ju-Young Yun, Gil-Heyun Choi, Byung-Hee Kim, Jong-Myeong Lee, Seung-Gil Yang | 2005-10-18 |
| 6951814 | Methods for forming a metal wiring layer on an integrated circuit device at reduced temperatures | Byung-Hee Kim, Gil-Heyun Choi, Ju-Young Yun | 2005-10-04 |