Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8366827 | Chamber inserts and apparatuses for processing a substrate | Jung-Hun Seo, Jin-Gi Hong, Kyung-Bum Koo, Yun-Ho Choi, Hyun-Chul Kwun | 2013-02-05 |
| 7820244 | Method of forming a layer and method of removing reaction by-products | Jung-Hun Seo, Jin-Gi Hong, Yun-Ho Choi, Hyun-Chul Kwun, Jin Ho Kim | 2010-10-26 |