Issued Patents All Time
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7217666 | Reactive ion milling/RIE assisted CMP | Hung-Chin Guthrie, Ming Jiang, Aron Pentek, Yi Zheng | 2007-05-15 |
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7217666 | Reactive ion milling/RIE assisted CMP | Hung-Chin Guthrie, Ming Jiang, Aron Pentek, Yi Zheng | 2007-05-15 |