Patents per Year
Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5257478 | Apparatus for interlayer planarization of semiconductor material | John V. H. Roberts | 1993-11-02 |
| 5095661 | Apparatus for transporting wafer to and from polishing head | Gerald L. Gill, Jr. | 1992-03-17 |
| 4944119 | Apparatus for transporting wafer to and from polishing head | Gerald L. Gill, Jr. | 1990-07-31 |