Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6165057 | Apparatus for localized planarization of semiconductor wafer surface | — | 2000-12-26 |
| 5779526 | Pad conditioner | — | 1998-07-14 |
| 5649854 | Polishing apparatus with indexing wafer processing stations | — | 1997-07-22 |
| 5624501 | Apparatus for cleaning semiconductor wafers | — | 1997-04-29 |
| 5562524 | Polishing apparatus | — | 1996-10-08 |
| 5144711 | Cleaning brush for semiconductor wafer | — | 1992-09-08 |
| 5095661 | Apparatus for transporting wafer to and from polishing head | Thomas C. Hyde | 1992-03-17 |
| 4989345 | Centrifugal spin dryer for semiconductor wafer | — | 1991-02-05 |
| 4944119 | Apparatus for transporting wafer to and from polishing head | Thomas C. Hyde | 1990-07-31 |
| 4811522 | Counterbalanced polishing apparatus | — | 1989-03-14 |
| 4193226 | Polishing apparatus | Philip J. Rioux | 1980-03-18 |