Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10054363 | Method and apparatus for cryogenic dynamic cooling | Chang Yi, Tatsuru Tanaka, Phi Cam Ha, Noe D. Taburaza, Hongling Liu | 2018-08-21 |
| 8919279 | Processing system having magnet keeper | Allen J. Bourez, Robert D. Hempstead, Jinliang Chen | 2014-12-30 |
| 8674327 | Systems and methods for uniformly implanting materials on substrates using directed magnetic fields | Chin Yim Poon, Paul Christopher Dorsey, Tatsuru Tanaka | 2014-03-18 |
| 8354618 | Load chamber with dual heaters | Jinliang Chen | 2013-01-15 |