Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10054363 | Method and apparatus for cryogenic dynamic cooling | Chang Yi, Tatsuru Tanaka, Phi Cam Ha, Yew Ming Chiong, Hongling Liu | 2018-08-21 |
| 9096934 | Load lock with variable conductance valve | Allen J. Bourez, Phi Cam Ha | 2015-08-04 |
| 8517657 | Corner chamber with heater | Jinliang Chen | 2013-08-27 |