Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9676609 | Integrated MEMS device | — | 2017-06-13 |
| 9359193 | Method for manufacturing an integrated MEMS device | — | 2016-06-07 |
| 8916449 | Package structure and substrate bonding method | Hung-Lin Yin, Li-Yuan Lin | 2014-12-23 |
| 7317575 | Tunable dispersive optical system | Kuen-Wey Shieh, Hsiao-Yu Chou | 2008-01-08 |
| 7247247 | Selective etching method | Huai-Yuan Chu, Julius Ming-Lin Tsai, Weileun Fang | 2007-07-24 |
| 7180144 | Corner compensation method for fabricating MEMS and structure thereof | Weileun Fang | 2007-02-20 |
| 7088030 | High-aspect-ratio-microstructure (HARM) | Huai-Yuan Chu, Julius Ming-Lin Tsai, Weileun Fang | 2006-08-08 |
| 6949396 | Corner compensation method for fabricating MEMS and structure thereof | Weileun Fang | 2005-09-27 |