Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7229521 | Etching system using a deionized water adding device | Chen-Hsien Ou, Sheng-Chou Gau, Jung-Lung Huang, Ching-Feng Chen, Chih-Hung Huang | 2007-06-12 |
| 6365015 | Method for depositing high density plasma chemical vapor deposition oxide in high aspect ratio gaps | Jessie C. Shan, Steve H. Y. Yang | 2002-04-02 |
| 6251795 | Method for depositing high density plasma chemical vapor deposition oxide with improved topography | Jesse C. Shan, Steve H. Y. Yang | 2001-06-26 |
| 6129819 | Method for depositing high density plasma chemical vapor deposition oxide in high aspect ratio gaps | Jessie C. Shan, Steve H. Y. Yang | 2000-10-10 |
| 4981811 | Process for fabricating low defect polysilicon | Anatoly Feygenson | 1991-01-01 |