Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6375011 | Vibrating conveyor and method for conveying silicon fragments | Dirk Flottmann, Franz Koppl, Matthaus Schantz | 2002-04-23 |
| 5820688 | Method for the treatment of semiconductor material | Franz Koppl, Matthaus Schantz | 1998-10-13 |
| 4454104 | Process for working up the residual gases obtained in the deposition of silicon and in the conversion of silicon tetrachloride | Rudolf Griesshammer, Franz Koppl, Helmut Lorenz | 1984-06-12 |
| 4211040 | Process for machining silicon rods and tubes by abrasion | Franz Koppl | 1980-07-08 |