| 6375011 |
Vibrating conveyor and method for conveying silicon fragments |
Franz Koppl, Matthaus Schantz, Friedrich Steudten |
2002-04-23 |
| 6360755 |
Method for processing semiconductor material |
Matthaus Schantz |
2002-03-26 |
| 6313013 |
Method and device for processing semiconductor material |
Gerhard Ast, Reinhard Wolf |
2001-11-06 |
| 6265683 |
Semiconductor material classification device |
Karl Hesse, Matthaus Schantz |
2001-07-24 |
| 6260712 |
Air separation of polysilicon |
Matthaus Schantz, Johann Heiss |
2001-07-17 |
| 6073773 |
Separation of semiconductor material |
Reinhard Wolf |
2000-06-13 |
| 6063697 |
Crushing of silicon on ultrapure ice |
Reinhard Wolf, Matthaus Schantz |
2000-05-16 |
| 6040544 |
Optoelectronic separation apparatus |
Matthaus Schantz, Franz Koppl |
2000-03-21 |