Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8529130 | Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application | Gerhard Schubert, Christian Jackel, Michael Boehm, René Bauer, Gerd Harnisch +3 more | 2013-09-10 |
| 8496221 | Aerostatically guided table system for vacuum application | Gerhard Schubert, Christian Jackel, Michael Boehm, René Bauer, Gerd Harnisch +3 more | 2013-07-30 |
| 8267582 | Table guided by aerostatic bearing elements for vacuum application | Gerhard Schubert, Christian Jackel, Michael Boehm, René Bauer, Gerd Harnisch +3 more | 2012-09-18 |
| 6639225 | Six-axis positioning system having a zero-magnetic-field space | Erik Beckert, Andrew Kenneth Hoffmann, Christoph Schaeffel, Eugen Saffert, Johannes Zentner +1 more | 2003-10-28 |
| 6480369 | System for receiving and retaining a substrate | Stefan Risse, Christoph Damm, Thomas Peschel | 2002-11-12 |
| 6426860 | Holding device for a substrate | Gerhard Schubert, Stefan Risse, Gerd Harnisch, Gerhard Kalkowski, Volker Guyenot | 2002-07-30 |