Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8529130 | Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application | Gerhard Schubert, Ulf-Carsten Kirschstein, Michael Boehm, René Bauer, Gerd Harnisch +3 more | 2013-09-10 |
| 8496221 | Aerostatically guided table system for vacuum application | Gerhard Schubert, Ulf-Carsten Kirschstein, Michael Boehm, René Bauer, Gerd Harnisch +3 more | 2013-07-30 |
| 8267582 | Table guided by aerostatic bearing elements for vacuum application | Gerhard Schubert, Ulf-Carsten Kirschstein, Michael Boehm, René Bauer, Gerd Harnisch +3 more | 2012-09-18 |