Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5864459 | Process for providing a glass dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process | Guo-Quan Lu | 1999-01-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5864459 | Process for providing a glass dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process | Guo-Quan Lu | 1999-01-26 |