| 10214806 |
Bellows-free retractable vacuum deposition sources |
Eric Daniel Readinger, Rikki Scott LaBere, Richard Charles Bresnahan |
2019-02-26 |
| 9187821 |
Vacuum deposition sources having heated effusion orifices |
Richard Charles Bresnahan |
2015-11-17 |
| 9062369 |
Deposition of high vapor pressure materials |
Chad Conroy |
2015-06-23 |
| 8871027 |
Electrical contacts for use with vacuum deposition sources |
— |
2014-10-28 |
| 8328561 |
Electrical contacts for use with vacuum deposition sources |
— |
2012-12-11 |
| 8192547 |
Thermally isolated cryopanel for vacuum deposition systems |
David W. Gotthold, Richard Charles Bresnahan, Mark Lee O'Steen |
2012-06-05 |
| 6718775 |
Dual chamber cooling system with cryogenic and non-cryogenic chambers for ultra high vacuum system |
Paul E. Colombo |
2004-04-13 |
| 6673699 |
Apparatus and method for batch processing semiconductor substrates in making semiconductor lasers |
Kevin J. Hubbard, Mark McElhinney, Paul E. Colombo |
2004-01-06 |
| 6451120 |
Apparatus and method for batch processing semiconductor substrates in making semiconductor lasers |
Kevin J. Hubbard, Mark McElhinney, Paul E. Colombo |
2002-09-17 |
| 6030458 |
Phosphorus effusion source |
Paul E. Colombo |
2000-02-29 |
| 5698168 |
Unibody gas plasma source technology |
Hwa Cheng |
1997-12-16 |
| 5693173 |
Thermal gas cracking source technology |
Paul E. Colombo |
1997-12-02 |