Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10591934 | Mass flow controller for substrate processing | Sudhakar Gopalakrishnan, Peter Reimer, Dennis R. Smith | 2020-03-17 |
| 4557819 | System for igniting and controlling a wafer processing plasma | David D. Meacham | 1985-12-10 |