Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423646 | Method for removing etch-induced polymer film and damaged silicon layer from a silicon surface | Tzu-Shih Yen, Pei-Wen Li | 2002-07-23 |
| 5904154 | Method for removing fluorinated photoresist layers from semiconductor substrates | Rong-Wu Chien, Tzu-Shih Yen | 1999-05-18 |