Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6294476 | Plasma surface treatment method for forming patterned TEOS based silicon oxide layer with reliable via and interconnection formed therethrough | Sen-Horng Lin, Yin Chen | 2001-09-25 |
| 6143666 | Plasma surface treatment method for forming patterned TEOS based silicon oxide layer with reliable via and interconnection formed therethrough | Sen-Horng Lin, Yin Chen | 2000-11-07 |