Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5773199 | Method for controlling linewidth by etching bottom anti-reflective coating | Kung Linliu, Hsu-Li Cheng | 1998-06-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5773199 | Method for controlling linewidth by etching bottom anti-reflective coating | Kung Linliu, Hsu-Li Cheng | 1998-06-30 |