Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7553471 | Method of manufacturing hydrophilic carbon nanotubes | Toshiyuki Ohashi, Hiroshi Sugahara | 2009-06-30 |
| 6726886 | Apparatus for cleaning semiconductor device | Yoshimi Shiramizu | 2004-04-27 |
| 6277767 | Method for cleaning semiconductor device | Yoshimi Shiramizu | 2001-08-21 |