Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10768531 | System and method of maskless lithography with the use of a curvilinear hologram | Vitaly Chernik, Mikhail Borisov, Aleksey Shamaev, Dmitry Chelyubeev | 2020-09-08 |
| 10162307 | System and method for generating a lithographic image with the use of a reflective concave curvilinear surface and a digital hologram in a diverging beam | Mikhail Borisov, Aleksey Shamaev, Dmitry Chelyubeev, Vitaly Chernik, Peter Mikheev | 2018-12-25 |
| 9952516 | System and method for generating a lithographic image with the use of a digital hologram and a reflective concave in curvilinear surface | Mikhail Borisov, Aleksey Shamaev, Dmitry Chelyubeev, Vitaly Chernik, Peter Mikheev | 2018-04-24 |
| 9557711 | Method of static scaling of image in holographic lithography | Mikhail Borisov, Aleksey Shamaev, Dmitry Chelyubeev, Aleksandr Gavrikov, Vitaly Chernik +1 more | 2017-01-31 |
| 9323219 | Method of microlithography with the use of divergent/convergent beams for holographic restoration of an image | — | 2016-04-26 |
| 9310768 | Method for synthesis and formation of a digital hologram for use in microlithography | Mikhail Borisov, Aleksey Shamaev, Dmitry Chelyubeev, Aleksandr Gavrikov, Vitaly Chernik +1 more | 2016-04-12 |
| 7605928 | Two-dimensional nanopositioner with crude and fine stages | — | 2009-10-20 |
| 5701057 | Method of obtaining electric discharge and device for effecting same | Jury Vasilievich Gerasimov, Jury Moiseevich Grinberg, Georgy Andreevich Djuzhev, Anatoly Anatolievich Kallistov, Vladimir Iliich Kurilenko | 1997-12-23 |