Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10162307 | System and method for generating a lithographic image with the use of a reflective concave curvilinear surface and a digital hologram in a diverging beam | Vadim Rakhovsky, Mikhail Borisov, Aleksey Shamaev, Dmitry Chelyubeev, Vitaly Chernik | 2018-12-25 |
| 9952516 | System and method for generating a lithographic image with the use of a digital hologram and a reflective concave in curvilinear surface | Vadim Rakhovsky, Mikhail Borisov, Aleksey Shamaev, Dmitry Chelyubeev, Vitaly Chernik | 2018-04-24 |
| 9557711 | Method of static scaling of image in holographic lithography | Vadim Rakhovsky, Mikhail Borisov, Aleksey Shamaev, Dmitry Chelyubeev, Aleksandr Gavrikov +1 more | 2017-01-31 |
| 9310768 | Method for synthesis and formation of a digital hologram for use in microlithography | Vadim Rakhovsky, Mikhail Borisov, Aleksey Shamaev, Dmitry Chelyubeev, Aleksandr Gavrikov +1 more | 2016-04-12 |