Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7014788 | Surface treatment method and equipment | Shuzo Fujimura | 2006-03-21 |
| 6579465 | Plasma surface treatment method and resulting device | Shuzo Fujimura | 2003-06-17 |
| 6562079 | Microwave discharge apparatus | — | 2003-05-13 |
| 6472299 | Method and apparatus for treating a substrate with hydrogen radicals at a temperature of less than 40 K | Kenzo Hiraoka, Chiharu Miyata | 2002-10-29 |
| 6419772 | Method for attaching radio wave absorber and structure for attaching the same | Toshinori Takao, Masayoshi Suzue, Hazime Hara, Hiroshi Nagata, Kazuhiko Mori +2 more | 2002-07-16 |
| 6255197 | Hydrogen annealing method and apparatus | Shuzo Fujimura | 2001-07-03 |
| 6149829 | Plasma surface treatment method and resulting device | Shuzo Fujimura | 2000-11-21 |
| 5259407 | Surface treatment method and apparatus for a semiconductor wafer | Junichi Tuchida | 1993-11-09 |