Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6150763 | Inductively-coupled high density plasma producing apparatus and plasma processing equipment provided with the same | Keh-Chyang Leou, Szu-Che Tsai, Tsang-Lang Lin, Chuen-Horng Tsai | 2000-11-21 |