Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383554 | Process for fabricating plasma with feedback control on plasma density | Cheng-Hung Chang, Chaung Lin, Yi-Mei Yang, Chuen-Horng Tsai, I. G. Chen | 2002-05-07 |
| 6150763 | Inductively-coupled high density plasma producing apparatus and plasma processing equipment provided with the same | Chai-Hao Chang, Szu-Che Tsai, Tsang-Lang Lin, Chuen-Horng Tsai | 2000-11-21 |