Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11680333 | Defect engineered high quality multilayer epitaxial graphene growth with thickness controllability | Tangali S. Sudarshan, MVS Chandrashekhar | 2023-06-20 |
| 10260166 | Method of growing high quality, thick SiC epitaxial films by eliminating silicon gas phase nucleation and suppressing parasitic deposition | Tangali S. Sudarshan, Haizheng Song | 2019-04-16 |
| 9885124 | Method of growing high quality, thick SiC epitaxial films by eliminating silicon gas phase nucleation and suppressing parasitic deposition | Tangali S. Sudarshan, Haizheng Song | 2018-02-06 |
| 9644287 | Pretreatment method for reduction and/or elimination of basal plane dislocations close to epilayer/substrate interface in growth of SiC epitaxial films | Tangali S. Sudarshan, Haizheng Song | 2017-05-09 |
| 9644288 | Pretreatment method for reduction and/or elimination of basal plane dislocations close to epilayer/substrate interface in growth of SiC epitaxial films | Tangali S. Sudarshan, Haizheng Song | 2017-05-09 |
| 8900979 | Pretreatment method for reduction and/or elimination of basal plane dislocations close to epilayer/substrate interface in growth of SiC epitaxial films | Tangali S. Sudarshan, Haizheng Song | 2014-12-02 |