Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10260166 | Method of growing high quality, thick SiC epitaxial films by eliminating silicon gas phase nucleation and suppressing parasitic deposition | Tangali S. Sudarshan, Tawhid Rana | 2019-04-16 |
| 9885124 | Method of growing high quality, thick SiC epitaxial films by eliminating silicon gas phase nucleation and suppressing parasitic deposition | Tangali S. Sudarshan, Tawhid Rana | 2018-02-06 |
| 9644287 | Pretreatment method for reduction and/or elimination of basal plane dislocations close to epilayer/substrate interface in growth of SiC epitaxial films | Tangali S. Sudarshan, Tawhid Rana | 2017-05-09 |
| 9644288 | Pretreatment method for reduction and/or elimination of basal plane dislocations close to epilayer/substrate interface in growth of SiC epitaxial films | Tangali S. Sudarshan, Tawhid Rana | 2017-05-09 |
| 8900979 | Pretreatment method for reduction and/or elimination of basal plane dislocations close to epilayer/substrate interface in growth of SiC epitaxial films | Tangali S. Sudarshan, Tawhid Rana | 2014-12-02 |