Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171013 | Leveraging precursor molecular composition and structure for atomic layer etching | Gottlieb S. Oehrlein, Chen-Hao Li | 2021-11-09 |
| 10790157 | Achieving etching selectivity for atomic layer etching processes by utilizing material-selective deposition phenomena | Gottlieb S. Oehrlein, Chen-Hao Li | 2020-09-29 |