Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7014786 | Methods and apparatus for forming submicron patterns on films | Erik Schaffer, Jurgen Mlynek, Thomas Thurn-Albrecht, Thomas P. Russell | 2006-03-21 |
| 6605229 | Process for producing antireflection coatings | Stefan Walheim, Erik Schaffer, Stefan Eggert, Jurgen Mlynek | 2003-08-12 |
| 6391217 | Methods and apparatus for forming submicron patterns on films | Erik Schaffer, Jurgen Mlynek, Thomas Thurn-Albrecht, Thomas P. Russell | 2002-05-21 |