Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7014786 | Methods and apparatus for forming submicron patterns on films | Erik Schaffer, Ullrich Steiner, Thomas Thurn-Albrecht, Thomas P. Russell | 2006-03-21 |
| 6605229 | Process for producing antireflection coatings | Ullrich Steiner, Stefan Walheim, Erik Schaffer, Stefan Eggert | 2003-08-12 |
| 6391217 | Methods and apparatus for forming submicron patterns on films | Erik Schaffer, Ullrich Steiner, Thomas Thurn-Albrecht, Thomas P. Russell | 2002-05-21 |
| 5999547 | Tunable optical parametric oscillator | Klaus Schneider, Stephan Schiller, Patrick Kramper | 1999-12-07 |