Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11787109 | 3-d structures having high temperature stability and improved microporosity | James O. Hardin, IV, John D. Berrigan | 2023-10-17 |
| 11613077 | 3-D structures having high temperature stability and improved microporosity | James O. Hardin, IV, John D. Berrigan | 2023-03-28 |
| 6805752 | Method and apparatus for reducing acidic contamination on a process wafer following an etching process | Chih-Yung Chang, Shiou Fieng-Chang Chien | 2004-10-19 |