Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805752 | Method and apparatus for reducing acidic contamination on a process wafer following an etching process | Chih-Yung Chang, Hsiang-Hsing Liu | 2004-10-19 |
SC
Shiou Fieng-Chang Chien
Overall (All Time): #3,493,014 of 4,157,543Top 85%
1
Patents All Time