Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5824602 | Helicon wave excitation to produce energetic electrons for manufacturing semiconductors | Albert R. Ellingboe | 1998-10-20 |
| 4232244 | Compact, maintainable 80-KeV neutral beam module | Joel H. Fink | 1980-11-04 |